Effect of Heat Treatment on the Structural-Phase State and Properties of a Multilayer Co-Cr-Al-Y Coating

The article describes the effect of heat treatment on structural-phase state and properties a multilayer Cr-Al-Co-Y coating obtained by magnetron sputtering. Heat was carried out at 400, 800 1000 °C. study microstructure electron microscopy with energy dispersive analysis powder X-ray diffraction. surface samples studied atomic force microscopy. thickness Co-Cr-Al-Y coatings 1.5–1.7 ± 0.2 µm. are characterized hardness 4.7–6.4 GPa. A distinctive feature layers is absence crystalline structure in some areas coating. main process occurring during thermal formation spinel-type phase. For single-layer sample after 400 °C, it not possible to fix extraneous reflections except for silicon substrate 111 220. rest samples, appearance number phases noticed, such as: SiO2, CoO, AlSi0.5O2.5 CrAl0.42Si1.58. An increase temperature up °C did lead significant changes. In case sample, various impurity disappeared Co3O4 phase formed. treated (Co3O4-CoCr2O4) observed all cases. Data can be used predict nature treatment.